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7.755  Articles
1 of 777 pages  |  10  records  |  more records»
Virtual metrology (VM) has been developed to economically perform wafer-to-wafer control, and has been used to estimate actual measurements from process data collected via sensors attached to corresponding equipment. Sensor data contains a large number of... see more

Discrete-event simulation is a well-established and rather successful method in some semiconductor companies. while other companies do not use simulation at all. Simulation is used for performance assessment and decision-making. This paper focuses on the ... see more

This paper presents a concurrent approach to solve the design problem of facility layout and automated material handling system(AMHS) for semiconductor fabs. The layout is composed of bays which are unequal-area blocks with equal height but flexible width... see more

With the increase in the scale of semiconductor manufacturing, the number of knowledge-workers has also increased tremendously. The cost of automation and manpower is increasing annually, and engineers and technical operators are playing an increasingly c... see more

The analysis of the characteristics of automated production processes and the cluster layout of technological complexes of nanoelectronicmanufacturing is carried out, an approach to improve the performance of automated cluster-based equipment in semicondu... see more

This paper proposes an evaluation framework of sustainable manufacturing (SM) initiatives using the hierarchical structure of sustainability indicators set adopted by the US National Institute of Standards and Technology (US NIST) in the context of the An... see more

1 of 777 pages  |  10  records  |  more records»